M(icro)E(lectro)M(echanical)S(ystems)

MEMS are microscaledevices that are capable of mechanical movement. The technology to produce MEMS devices takes advantage of the very high standards in the fabrication of microelectronic devices. This results in a large degree of freedom and a high precision in their design and the possibilities for MEMS devices cover a broad variety of applications.

Although fabrication and application possibilities are huge, problems occur if one explores the world on such a small scale; especially high adhesion, friction and wear, leading to poor reliability.

Reliability has long been (and still is) a major issue for MEMS, nevertheless nowadays MEMS devices are used in a variety of commercial applications, e.g.:

• Accelerometers in airbag sensors, Nintendo Wii remotes and iPhones.
• Pressure sensors.
• Mechanical movement in beamers.

Current research on MEMS in Leiden is focused on:

• MEMSPM: doing ultrafast SPM (scanning probe microscopy) with a MEMS device.
• Tribology (friction, lubrication and wear): How does microscale tribology differ from the atomic scale and the macroscale?
• MEMSAMP: a purely (micro)mechanical amplifier for electrical signals.